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Other articles related with "tip characterizer"：
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30601 |
Ziruo Wu(吴子若), Yanni Cai(蔡燕妮), Xingrui Wang(王星睿), Longfei Zhang(张龙飞), Xiao Deng(邓晓), Xinbin Cheng(程鑫彬), Tongbao Li(李同保) |
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Amorphous Si critical dimension structures with direct Si lattice calibration |
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Chin. Phys. B
2019 Vol.28 (3): 30601-030601
[Abstract]
(659)
[HTML 1 KB]
[PDF 3718 KB]
(146)
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